Company record
Actinix designs and produces advanced laser systems and optical metrology equipment, with a focus on far‑UV solid‑state technology. Its portfolio includes both kilohertz‑rate and 10‑hertz‑rate lasers that operate at wavelengths below 200 nm. The kilohertz model delivers a 193.4 nm output at 5 kHz, provides 5 µJ per pulse, projects a 1 mm beam, generates 7 ns pulses and maintains pulse‑energy stability under 10 %. The 10 Hz series covers the 192‑200 nm band, runs at 10‑20 Hz, emits a 5 mm beam, produces 2‑3 ns pulses and achieves pulse‑energy stability better than 6 %. Actinix’s tools support imaging, measurement and fabrication of nanoscale structures, and they are employed in interferometric immersion laser ablation, immersion lithography, photomask haze analysis, wafer and mask inspection, as well as photomask phase metrology.
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