tmpi

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tmpi delivers chemical and mechanical cleaning services tailored to a broad spectrum of semiconductor and vacuum‑technology components. The company’s processes are applied to systems, shields, platens, stainless liners, shutters, process‑chamber doors, transfer plates, stainless‑steel bell jars, roughing lines, process chambers, as well as CVD and PVD parts. Additional capabilities include cleaning of valves, ion sources, diffusion pumps and wave guides.

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